|
Subsequent Events (Details) (USD $)
In Thousands, except Share data, unless otherwise specified |
3 Months Ended | 6 Months Ended | 3 Months Ended | 6 Months Ended | 1 Months Ended | ||||
|---|---|---|---|---|---|---|---|---|---|
|
Jun. 30, 2014
|
Jun. 30, 2013
|
Jun. 30, 2014
|
Jun. 30, 2013
|
Jun. 30, 2014
Rudolph Technologies, Inc [Member]
|
Jun. 30, 2013
Rudolph Technologies, Inc [Member]
|
Jun. 30, 2014
Rudolph Technologies, Inc [Member]
|
Jun. 30, 2013
Rudolph Technologies, Inc [Member]
|
Aug. 08, 2014
Rudolph Technologies, Inc [Member]
Subsequent Event [Member]
|
|
| Subsequent Event [Line Items] | |||||||||
| Available-for-sale shares sold | 18,240 | 24,431 | 67,419 | 31,931 | 25,700 | ||||
| Proceeds from Sale and Maturity of Available-for-sale Securities | $ 759 | $ 405 | $ 262 | ||||||
| Gain on sale of available-for-sale securities | $ 203 | $ 298 | $ 750 | $ 401 | $ 203 | $ 297 | $ 750 | $ 400 | $ 258 |