|
Subsequent Events (Details) (USD $)
In Thousands, except Share data, unless otherwise specified |
12 Months Ended | 1 Months Ended | 12 Months Ended | 3 Months Ended | |||||
|---|---|---|---|---|---|---|---|---|---|
|
Dec. 31, 2013
|
Dec. 31, 2012
|
Feb. 18, 2014
Subsequent Event [Member]
|
Feb. 18, 2014
Paid At Closing [Member]
Subsequent Event [Member]
|
Feb. 18, 2014
Paid On First Anniversary [Member]
Subsequent Event [Member]
|
Feb. 18, 2014
Paid On Second Anniversary [Member]
Subsequent Event [Member]
|
Dec. 31, 2013
Rudolph Technologies, Inc [Member]
|
Dec. 31, 2012
Rudolph Technologies, Inc [Member]
|
Mar. 14, 2014
Rudolph Technologies, Inc [Member]
Subsequent Event [Member]
|
|
| Subsequent Event [Line Items] | |||||||||
| Available-for-sale shares sold | 41,931 | 70,000 | 39,179 | ||||||
| Proceeds from Sale and Maturity of Available-for-sale Securities | $ 536 | $ 874 | $ 439 | ||||||
| Gain on sale of available-for-sale securities | 530 | 794 | 529 | 794 | 434 | ||||
| Payments for acquisition | 1,200 | 400 | 400 | 400 | |||||
| Potential contingent consideration | $ 550 | ||||||||