SILICON VALLEY GROUP INC

S-4

S-4

EXH 2.2 TLI VOTING AGREEMENT

EX-2.2

EXH 2.3 TLI AFFILIATE AGREEMENT

EX-2.3

EXHIBIT 5.1

EX-5.1

EXH 23.1

EX-23.1

EXH 23.2 CONSENT OF INDEPENDENT AUDITORS

EX-23.2

EXH 99.1 TLI PROXY CARD

EX-99.1