X0201 3/A 2003-09-02 2003-09-09 0 0001094392 RUDOLPH TECHNOLOGIES INC rtec 0001262607 SOBEL ELIOT M ONE RUDOLPH RD PO BOX 1000 FLANDERS NJ 07836 0 1 0 0 V.P., Manufacturing Common Stock 1248 D Non-Qualified Stock Option (right to buy) 14.62 2003-10-18 2012-10-17 Common Stock 2500 D Non-Qualified Stock Option (right to buy) 26.42 2003-05-13 2012-05-12 Common Stock 10000 D Includes shares acquired through Employee Stock Purchase Plan. 20% of the shares of Common Stock subject to the Option becomes exercisable twelve months after the date the Option was granted and 1/60th of the shares of Common Stock subject to the Option vest each month thereafter. The previously filed Form 3 incorrectly ommitted 322 shares beneficially owned by the reporting person. 459 shares were acquired pursuant to a purchase under the Employee Stock Purchase Plan on 10/31/2003. /s/ Eliot M. Sobel 2003-11-18